Wafer Diameter--200 mm Vendor Tool Serial Year--2001 Operational Status--Operational OEM--Tokyo Electron Tool Model--ACT 8 Process--3 Coat and 4 Develop Track Software Version--3.04.025 System Power Rating--208 VAC 3-Phase Loading Configuration--4 Loader Uni - Cassette
System Comes With: 1 Main Body 1 AC Power Box 1 Carrier Station 1 X 4 Side Loading 1 T & H Controller 2 Process Station Block 1 HIGH SPEED INTERFACE STATION FOR CANON ES3 1 Developer Unit 2 Temperature Control Unit 2 External Chemical Cabinet
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