Wafer Diameter--200 mm Vendor Tool Serial --W738 Year--1999 Operational Status--Operational OEM--APPLIED MATERIALS Tool Model--SEMVision Cx Process--SEM Review Chamber Type—1 Unit Process Chamber Software Version--4.2.200 System Power Rating--208 V AC 4F (WYE), 50/60Hz Power supply: UPS. USA, 208V, 3ph, STAR Loading Configuration--Two Loaders Robot--Single Transfer Arm
System Configuration
1--SEMIVISION Cx Defect review Sys Including Color MPSI for Enhanced Topography & Material Information 2--UPS input Voltage are nominal with a +/- 10% tolerance window UPS: USA, 208V , 3ph, star 3--SEM Based ADC Package 4--Un-patterned Wafer Review -n CX 5--Stage Rotation 6--Rear Entry Utilities (Std connection is r.h. side entry) 7--SECS-II GEM Compatible Host Communication S/W
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